The 6π Advantages & Double Shuttering

 

1. Low target costs due to the cylindrical rotating cathodes

 

  • large effective target surface; d * pi * h
  • consistent target erosion
  • maximum target life; ~200 batches
  • low target costs / tool; ~0.07 CHF / tool

 

2. Optimum adhesion with Virtual and Tube Shutters® due to:

 

  • turnable magnetic field
    • to the back for fast target cleaning
    • to the substrates for deposition
  • permanent presence of pure Ti or Cr target

 

3. Smooth coating surface with minimized droplets due to:

 

  • Virtual and Tube Shutters®
  • fast (double) ARC track motion
  • special heaters with dust filter

 

 

 

 

 

 6.  Programmable stoichiometry due to:

  • minimum distance between 2 targets

Deposition of:

  • nanocomposites
  • multi- and nanolayers, gradient coatings
  • without changing the not alloyed targets: Ti, Cr, Al, Al(Si), Zr

5. High deposition rate due to:

  • high ionized plasma with
  • high magnetic field intensity
  • typically 2 - 8 μm / hour

 

4. High hardness with the Nanocomposite coatings due to:

 

  • segregation into 2 phases, e.g. (nc-TiAlN)/(a-SiN)
  • from 2 targets very close to each other

 

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