Convertibility to p80 or p80+
Hardware
- Foot print: W1870 x D1320 x H2155 mm
- Vacuum chamber with internal sizes of: W400 x D380 x H520 mm
- Usable plasma volume: Ø300 x H400 mm
- Virtual Shutter®
- DC BIAS supply
- Electrical connection: 3x400V,100A external fuse 50-60 Hz, <25 kW
p80+ Additional Hardware
- Tube Shutters®
- Pulsed BIAS
- Dust filter for heaters
Convertibility to p80 or p80+
The PL70 can be converted to a p80 or p80+ unit. To perform the conversion, the coating door containing the cathodes as well as
the faceplates are exchanged, the electonics hardware is extended, and new control software is installed.
Its low costs and the ability to upgrade makes the PL70 the optimal choice for coating start-ups. Also, it can be used as a second machine alongside an existing p80, for applying conventional coatings only.